Introduction to Heat Transfer
Introduction to Heat Transfer
6th Edition
ISBN: 9780470501962
Author: Frank P. Incropera, David P. DeWitt, Theodore L. Bergman, Adrienne S. Lavine
Publisher: Wiley, John & Sons, Incorporated
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Chapter 3, Problem 3.68P

Referring to the semiconductor processing tool of Problem 5.13, it is desired at some point in the manufacturing cycle to cool the chuck, which is made of aluminum alloy 2024. The proposed cooling scheme passes air at 20°C between the air-supply head and the chuck surface.

Chapter 3, Problem 3.68P, Referring to the semiconductor processing tool of Problem 5.13, it is desired at some point in the

(a) If the chuck is initially at a uniform temperature of l00°C, calculate the time required for its lower surface to reach 25°C, assuming a uniform convection coefficient of 50 W / m 2 K at the head—chuck interface.

(b) Generate a plot of the time-to-cool as a function of the convection coefficient for the range 10 h 2000 W / m 2 K . If the lower limit represents a free convection condition without any head present, comment on the effectiveness of the head design as a method for cooling the chuck.

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Chapter 3 Solutions

Introduction to Heat Transfer

Ch. 3 - Prob. 3.11PCh. 3 - A thermopane window consists of two pieces of...Ch. 3 - A house has a composite wall of wood, fiberglass...Ch. 3 - Prob. 3.14PCh. 3 - Prob. 3.15PCh. 3 - Work Problem 3.15 assuming surfaces parallel to...Ch. 3 - Consider the oven of Problem 1.54. The walls of...Ch. 3 - The composite wall of an oven consists of three...Ch. 3 - The wall of a drying oven is constructed by...Ch. 3 - The t=4-mm-thick glass windows of an...Ch. 3 - Prob. 3.21PCh. 3 - In the design of buildings, energy conservation...Ch. 3 - Prob. 3.23PCh. 3 - Prob. 3.24PCh. 3 - Prob. 3.25PCh. 3 - A composite wall separates combustion gases at...Ch. 3 - Prob. 3.27PCh. 3 - Prob. 3.28PCh. 3 - Prob. 3.29PCh. 3 - The performance of gas turbine engines may...Ch. 3 - A commercial grade cubical freezer, 3 m on a...Ch. 3 - Prob. 3.32PCh. 3 - Prob. 3.33PCh. 3 - Prob. 3.34PCh. 3 - A batt of glass fiber insulation is of density...Ch. 3 - Air usually constitutes up to half of the volume...Ch. 3 - Prob. 3.37PCh. 3 - Prob. 3.38PCh. 3 - The diagram shows a conical section fabricatedfrom...Ch. 3 - Prob. 3.40PCh. 3 - From Figure 2.5 it is evident that, over a wide...Ch. 3 - Consider a tube wall of inner and outer radii ri...Ch. 3 - Prob. 3.43PCh. 3 - Prob. 3.44PCh. 3 - Prob. 3.45PCh. 3 - Prob. 3.46PCh. 3 - To maximize production and minimize pumping...Ch. 3 - A thin electrical heater is wrapped around the...Ch. 3 - Prob. 3.50PCh. 3 - Prob. 3.51PCh. 3 - Prob. 3.52PCh. 3 - A wire of diameter D=2mm and uniform temperatureT...Ch. 3 - Prob. 3.54PCh. 3 - Electric current flows through a long rod...Ch. 3 - Prob. 3.56PCh. 3 - A long, highly polished aluminum rod of diameter...Ch. 3 - Prob. 3.58PCh. 3 - Prob. 3.59PCh. 3 - Prob. 3.60PCh. 3 - Prob. 3.61PCh. 3 - Prob. 3.62PCh. 3 - Consider the series solution, Equation 5.42, for...Ch. 3 - Prob. 3.64PCh. 3 - Copper-coated, epoxy-filled fiberglass circuit...Ch. 3 - Prob. 3.66PCh. 3 - A constant-property, one-dimensional Plane slab of...Ch. 3 - Referring to the semiconductor processing tool of...Ch. 3 - Prob. 3.69PCh. 3 - Prob. 3.70PCh. 3 - Prob. 3.71PCh. 3 - The 150-mm-thick wall of a gas-fired furnace is...Ch. 3 - Steel is sequentially heated and cooled (annealed)...Ch. 3 - Prob. 3.74PCh. 3 - Prob. 3.75PCh. 3 - Prob. 3.76PCh. 3 - Prob. 3.77PCh. 3 - Prob. 3.78PCh. 3 - The strength and stability of tires may be...Ch. 3 - Prob. 3.80PCh. 3 - Prob. 3.81PCh. 3 - A long rod of 60-mm diameter and thermophysical...Ch. 3 - A long cylinder of 30-min diameter, initially at a...Ch. 3 - Work Problem 5.47 for a cylinder of radius r0 and...Ch. 3 - Prob. 3.85PCh. 3 - Prob. 3.86PCh. 3 - Prob. 3.87PCh. 3 - Prob. 3.88PCh. 3 - Prob. 3.89PCh. 3 - Prob. 3.90PCh. 3 - Prob. 3.91PCh. 3 - Prob. 3.92PCh. 3 - In Section 5.2 we noted that the value of the Biot...Ch. 3 - Prob. 3.94PCh. 3 - Prob. 3.95PCh. 3 - Prob. 3.96PCh. 3 - Prob. 3.97PCh. 3 - Prob. 3.98PCh. 3 - Work Problem 5.47 for the case of a sphere of...Ch. 3 - Prob. 3.100PCh. 3 - Prob. 3.101PCh. 3 - Prob. 3.102PCh. 3 - Prob. 3.103PCh. 3 - Consider the plane wall of thickness 2L, the...Ch. 3 - Problem 4.9 addressed radioactive wastes stored...Ch. 3 - Prob. 3.106PCh. 3 - Prob. 3.107PCh. 3 - Prob. 3.108PCh. 3 - Prob. 3.109PCh. 3 - Prob. 3.110PCh. 3 - A one-dimensional slab of thickness 2L is...Ch. 3 - Prob. 3.112PCh. 3 - Prob. 3.113PCh. 3 - Prob. 3.114PCh. 3 - Prob. 3.115PCh. 3 - Derive the transient, two-dimensional...Ch. 3 - Prob. 3.117PCh. 3 - Prob. 3.118PCh. 3 - Prob. 3.119PCh. 3 - Prob. 3.120PCh. 3 - Prob. 3.121PCh. 3 - Prob. 3.122PCh. 3 - Consider two plates, A and B, that are each...Ch. 3 - Consider the fuel element of Example 5.11, which...Ch. 3 - Prob. 3.125PCh. 3 - Prob. 3.126PCh. 3 - Prob. 3.127PCh. 3 - Prob. 3.128PCh. 3 - Prob. 3.129PCh. 3 - Consider the thick slab of copper in Example 5.12,...Ch. 3 - In Section 5.5, the one-term approximation to the...Ch. 3 - Thermal energy storage systems commonly involve a...Ch. 3 - Prob. 3.133PCh. 3 - Prob. 3.134PCh. 3 - Prob. 3.135PCh. 3 - A tantalum rod of diameter 3 mm and length 120 mm...Ch. 3 - A support rod k=15W/mK,=4.0106m2/s of diameter...Ch. 3 - Prob. 3.138PCh. 3 - Prob. 3.139PCh. 3 - A thin circular disk is subjected to induction...Ch. 3 - An electrical cable, experiencing uniform...Ch. 3 - Prob. 3.142PCh. 3 - Prob. 3.145PCh. 3 - Consider the fuel element of Example 5.11, which...Ch. 3 - Prob. 3.147PCh. 3 - Prob. 3.148PCh. 3 - Prob. 3.149PCh. 3 - Prob. 3.150PCh. 3 - In a manufacturing process, stainless steel...Ch. 3 - Prob. 3.153PCh. 3 - Carbon steel (AISI 1010) shafts of 0.1-m diameter...Ch. 3 - A thermal energy storage unit consists of a large...Ch. 3 - Small spherical particles of diameter D=50m...Ch. 3 - A spherical vessel used as a reactor for producing...Ch. 3 - Batch processes are often used in chemical and...Ch. 3 - Consider a thin electrical heater attached to a...Ch. 3 - An electronic device, such as a power transistor...Ch. 3 - Prob. 3.161PCh. 3 - In a material processing experiment conducted...Ch. 3 - Prob. 3.165PCh. 3 - Prob. 3.166PCh. 3 - Prob. 3.167PCh. 3 - Prob. 3.168PCh. 3 - Prob. 3.173PCh. 3 - Prob. 3.174PCh. 3 - Prob. 3.175PCh. 3 - Prob. 3.176PCh. 3 - Prob. 3.177P
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