Introduction to Heat Transfer
6th Edition
ISBN: 9780470501962
Author: Frank P. Incropera, David P. DeWitt, Theodore L. Bergman, Adrienne S. Lavine
Publisher: Wiley, John & Sons, Incorporated
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Textbook Question
Chapter 3, Problem 3.68P
Referring to the semiconductor processing tool of Problem 5.13, it is desired at some point in the manufacturing cycle to cool the chuck, which is made of aluminum alloy 2024. The proposed cooling scheme passes air at 20°C between the air-supply head and the chuck surface.
(a) If the chuck is initially at a uniform temperature of l00°C, calculate the time required for its lower surface to reach 25°C, assuming a uniform convection coefficient of
(b) Generate a plot of the time-to-cool as a function of the convection coefficient for the range
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Chapter 3 Solutions
Introduction to Heat Transfer
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