7th Edition

ISBN: 9780470501979

Author: Frank P. Incropera, David P. DeWitt, Theodore L. Bergman, Adrienne S. Lavine

Publisher: Wiley, John & Sons, Incorporated

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Textbook Question

Chapter 1, Problem 1.34P

A vacuum system, as used ¡n sputtering electrically conducting thin films on microcircuits, is comprised of a baseplate maintained by an electrical heater at 300 K anda shroud within the enclosure maintained at 77 K by aliquid-nitrogen coolant loop. The circular baseplate, insulated on the lower side, is 0.3 m in diameter and has an emissivity of 0.25.
Chapter 1, Problem 1.34P, A vacuum system, as used ¡n sputtering electrically conducting thin films on microcircuits, is
(a) How much electrical power must be provided tothe baseplate heater?
(b) At what rate must liquid nitrogen be supplied to theshroud it its heat of vaporization is 125 kJ/kg?
(e) To reduce the liquid nitrogen consumption, it isproposed to bond a thin sheet of aluminum foil ( ∈ = 0.09 ) to the baseplate. Will this have the desired effect?

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Chapter 1, Problem 1.33P

Chapter 1, Problem 1.35P

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Chapter 1 Solutions

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Solution Summary: The author explains how the power generated in the heater is converted into heat energy and then dissipated from the surface by radiation mode of heat transfer.

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