Problem 6: A capacitive silicon accelerometer with its proof mass, fixed electrode, beam and anchor is shown in the figure below. Dimensions are also given. Fixed electrode is perfectly parallel to the silicon mass. Its dimension along Y axis is 1 mm and it starts aligned with the edge of the mass. Assume that the Young's modulus for Si is 190 GPa, Poisson's ratio 0.3 and that the density of Si is 2330 kg/m³. Length=1mm Anchor Si Proof Mass 1mmx1mm Thickness-500um Width=10pm Si Beam 0.5um Thick 1 mm Gap 1 um • Fixed electrode 1.5 mm

Problem 6: A capacitive silicon accelerometer with its proof mass, fixed electrode, beam and anchor is shown in the figure below. Dimensions are also given. Fixed electrode is perfectly parallel to the silicon mass. Its dimension along Y axis is 1 mm and it starts aligned with the edge of the mass. Assume that the Young's modulus for Si is 190 GPa, Poisson's ratio 0.3 and that the density of Si is 2330 kg/m³. Length=1mm Anchor Si Proof Mass 1mmx1mm Thickness-500um Width=10pm Si Beam 0.5um Thick 1 mm Gap 1 um • Fixed electrode 1.5 mm

Electricity for Refrigeration, Heating, and Air Conditioning (MindTap Course List)

10th Edition

ISBN:9781337399128

Author:Russell E. Smith

Publisher:Russell E. Smith

Chapter12: Electronic Control Devices

Section: Chapter Questions

Problem 14RQ

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