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Nt1310 Unit 1 Lab Report

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II. DEVICE DESCRIPTION The main mechanical structure is modified version of the structure that is described in the [1,3]. The device consists of a proof mass which is attached to two similar double-ended tuning fork resonators via a force amplifier like a mechanical lever with a special configuration. This schematic of this structure is depicted in Fig. 1. Each of the DETF resonators is actuated to their resonance electrostatically and they will be sustained in their resonance by a feedback loop[17]. When an external acceleration is applied to the structure in proper direction, the proof mass will deflect and as a result of this movement an axial force will transfer to the DETF resonators. This axial force will result a change in the stiffness of the resonators so there will be a shift in the resonance frequencies of these DETF resonators[3]. These shift in resonance …show more content…

Under external acceleration, the seismic mass will move to one side and this movement will cause a tensile force in one of the resonators and a compressive force on the other one. These axial forces will cause an opposite change in the stiffness of the resonators and this opposite change separates their resonance frequencies[5]. These double-ended resonators also provide a differential output which has so many advantages like cancelling the output’s offset and effect of temperature variations on frequency. Fig. 1. (a) Schematic view of the structure at rest. (b) Schematic view under external acceleration III. THEORETICAL STRUCTURE ANALYSIS Structure analysis is very important in design of MEMS devices in order to optimize the device performance. In the following step of this paper an analysis of a doubled ended tuning fork in the presence of an axial forced is performed. Then scale factor for this sensor is derived from relationship between natural frequency of the resonator and the applied

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