1. Explain each of the following terminologies that are often used for optical lithography, draw schematics explain them wherever possible. (A) (B) Resolution Depth of focus Field size Overlay accuracy

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1. Explain each of the following terminologies that are often used for optical lithography,
draw schematics explain them wherever possible.
(A)
(B)
Resolution
Depth of focus
Field size
Overlay accuracy
Transcribed Image Text:1. Explain each of the following terminologies that are often used for optical lithography, draw schematics explain them wherever possible. (A) (B) Resolution Depth of focus Field size Overlay accuracy
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