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The Separation Of Argon, A Uniform Dc Electric Field At Different Discharge Gaps And Cathode Potentials

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Abstract- A home-made dc sputtering is characterized by cathode potential of 250-2000 V and sputtering gas pressures of (3.5×10-2 – 1.5) mbar. This paper studies in experiment the breakdown of argon, a uniform dc electric field at different discharge gaps and cathode potentials. Paschen curves for Argon are obtained by measuring the breakdown voltage of gas within at different target cu,Au,Ag, vacuum chamber . The Paschen curves in Ar gases show that the breakdown voltage between two electrodes is a function of pd (The product of the pressure inside the chamber and distance between the electrodes). Current-voltage characteristics visualization of the discharge indicate that the discharge is operating in the abnormal glow region.

Keywords: gold target , gas discharge, glow discharge, plasma , dc sputtering.

I. INTRODUCTION
Dc glow discharges are widely applied for depositing thin films, etching, plasma polymerization, oxidation, and pumping gas discharge lasers, etc. Therefore the research into the conditions of the dc glow discharge is of considerable interest [1]-[6]. Plasmas are ionized gases; hence, they consist of positive (and negative) ions and electrons, as well as neutral species. Therefore, the ignition of the dc glow discharge is one of the oldest problems in the study of low-pressure gas discharges. The mechanism of the gas discharge can be explained as follows: When a sufficiently high potential difference is applied between two electrodes placed in a

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