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Questions On Gas Transfer Vacuum

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MTSE 6600 Assignment #1:
TEM Components and Alignments
Name: Tianhao Wang

Components:
Vacuum System:
#1: What is the difference between a gas transfer and a gas entrapment vacuum pump?

Answer: A Gas Transfer Vacuum Pump will move the molecules out of the system so that the vacuum environment is formed. And an Entrapment Vacuum Pump will trap the molecules in some way, and they can’t move freely any longer so that the vacuum environment is formed.

#2: What are the two types of gas transfer pumps?

Answer: (1) Positive Displacement Pumps and (2) Kinetic Vacuum Pumps.

#3: Describe how any two types of vacuum pumps work.

Answer:
(1)The Positive Displacement Pump:
The Positive Displacement Pump exhausts a certain volume of gas successively to reduce the pressure of a system and creates a partial vacuum. The schematic diagram is shown below. (Source: Basic Vacuum Practice, 3rd Edition, Varian Vacuum Products.)

(2) Ion Getter Pump:
First, Gases are ionized which will be trapped to the cathode. Then the sputtered Ti atoms will cover the gas ions trapped on the cathode. Thus, this chemisorption is completed. The schematic diagram is shown in next page.

(Source: http://www4.nau.edu/microanalysis/Microprobe-SEM/Images/Ion_Pump_Operation.jpg)

#4: Give two reasons why we want to have a good vacuum in the TEM. Briefly describe the importance of these two reasons.

Answer: (1) The increase of the mean free path and (2)

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