What is bulk micromachining? For which MEMS

Understanding Motor Controls
4th Edition
ISBN:9781337798686
Author:Stephen L. Herman
Publisher:Stephen L. Herman
Chapter17: Temperature Sensing Devices
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Problem 14RQ: Assume that a silicon diode is being used as a temperature detector. If its temperature increases,...
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What is bulk micromachining? For which MEMS applications is it used for and on what material(s)? Give examples of materials and techniques used to bulk-micromachine. Provide a process flow diagram of a fabrication process for a sample MEMS device that uses bulk micromachining technique

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