The table below shows some published values of the growth parameters of SiO2 on silicon. For the dry growth process, the parameter z is already evaluated. Table 4.1 Oxidation coefficients for silicon Dry Wet (640 torr) Temperature (C) A (um) B (um/hr) 7 (hr) A (um) B (um³/hr) 800 920 0.370 0.235 0.165 0.0011 0.0049 1.4 0.50 0.203 0.37 0.076 0.027 1000 0.0117 0.226 0.287 0.510 0.720 0.090 0.027 0.11 1100 1200 0.040 0.045 0.05 a) At a temperature of 1100°C, what starting oxide thickness does this data for the dry oxide growth assume? b) Using the parameters in the above table, determine total thickness if a dry oxidation was carried out for 5 hours at 1100°C. “

Chemistry
10th Edition
ISBN:9781305957404
Author:Steven S. Zumdahl, Susan A. Zumdahl, Donald J. DeCoste
Publisher:Steven S. Zumdahl, Susan A. Zumdahl, Donald J. DeCoste
Chapter1: Chemical Foundations
Section: Chapter Questions
Problem 1RQ: Define and explain the differences between the following terms. a. law and theory b. theory and...
icon
Related questions
Question
The table below shows some published values of the growth parameters of SiO2 on silicon. For the dry
growth process, the parameter t is already evaluated.
Table 4.1 Oxidation coefficients for silicon
Dry
Wet (640 torr)
Temperature ("C)
A (µm)
B (um'/hr)
T (hr)
A (um)
B (um'/hr)
0.370
0.235
0.165
0.0011
800
920
0.50
0.203
1.4
0.37
0.0049
0.0117
0.027
0.226
0.11
0.05
0.287
0.510
0.720
1000
0.076
1100
1200
0.090
0.040
0.045
0.027
a) At a temperature of 1100°C, what starting oxide thickness does this data for the dry oxide
growth assume?
b) Using the parameters in the above table, determine total thickness if a dry oxidation was carried
out for 5 hours at 1100°C. "
Transcribed Image Text:The table below shows some published values of the growth parameters of SiO2 on silicon. For the dry growth process, the parameter t is already evaluated. Table 4.1 Oxidation coefficients for silicon Dry Wet (640 torr) Temperature ("C) A (µm) B (um'/hr) T (hr) A (um) B (um'/hr) 0.370 0.235 0.165 0.0011 800 920 0.50 0.203 1.4 0.37 0.0049 0.0117 0.027 0.226 0.11 0.05 0.287 0.510 0.720 1000 0.076 1100 1200 0.090 0.040 0.045 0.027 a) At a temperature of 1100°C, what starting oxide thickness does this data for the dry oxide growth assume? b) Using the parameters in the above table, determine total thickness if a dry oxidation was carried out for 5 hours at 1100°C. "
Expert Solution
trending now

Trending now

This is a popular solution!

steps

Step by step

Solved in 2 steps with 2 images

Blurred answer
Knowledge Booster
Uses of d-Block Elements
Learn more about
Need a deep-dive on the concept behind this application? Look no further. Learn more about this topic, chemistry and related others by exploring similar questions and additional content below.
Similar questions
Recommended textbooks for you
Chemistry
Chemistry
Chemistry
ISBN:
9781305957404
Author:
Steven S. Zumdahl, Susan A. Zumdahl, Donald J. DeCoste
Publisher:
Cengage Learning
Chemistry
Chemistry
Chemistry
ISBN:
9781259911156
Author:
Raymond Chang Dr., Jason Overby Professor
Publisher:
McGraw-Hill Education
Principles of Instrumental Analysis
Principles of Instrumental Analysis
Chemistry
ISBN:
9781305577213
Author:
Douglas A. Skoog, F. James Holler, Stanley R. Crouch
Publisher:
Cengage Learning
Organic Chemistry
Organic Chemistry
Chemistry
ISBN:
9780078021558
Author:
Janice Gorzynski Smith Dr.
Publisher:
McGraw-Hill Education
Chemistry: Principles and Reactions
Chemistry: Principles and Reactions
Chemistry
ISBN:
9781305079373
Author:
William L. Masterton, Cecile N. Hurley
Publisher:
Cengage Learning
Elementary Principles of Chemical Processes, Bind…
Elementary Principles of Chemical Processes, Bind…
Chemistry
ISBN:
9781118431221
Author:
Richard M. Felder, Ronald W. Rousseau, Lisa G. Bullard
Publisher:
WILEY