kind of pattern can you get by exposing light through following quartz photomask to the Si wafer coated with negative and positive tone? Please draw pattern for each wafer. Cr Quartz Negative tone PR coated Si wafer Positive tone PR coated Si wafer

kind of pattern can you get by exposing light through following quartz photomask to the Si wafer coated with negative and positive tone? Please draw pattern for each wafer. Cr Quartz Negative tone PR coated Si wafer Positive tone PR coated Si wafer

Principles of Instrumental Analysis

7th Edition

ISBN:9781305577213

Author:Douglas A. Skoog, F. James Holler, Stanley R. Crouch

Publisher:Douglas A. Skoog, F. James Holler, Stanley R. Crouch

Chapter13: An Introduction To Ultraviolet-visible Molecular Absorption Spectrometry

Section: Chapter Questions

Problem 13.20QAP

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Concept explainers

Spectroanalytical Methods

Spectroanalytical methods measure the wavelength and intensity of radiations that are either emitted or absorbed by a molecular or atomic species. These methods are useful for evaluating the electronic or atomic arrangement of the molecules of a given analyte.

Question

What kind of pattern can you get by exposing UV light through following quartz photomask to the
Si wafer coated with negative and positive tone? Please draw pattern for each wafer.
Cr
Quartz
Negative tone PR
coated Si wafer
Positive tone PR
coated Si wafer

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