Elements Of Electromagnetics
7th Edition
ISBN: 9780190698614
Author: Sadiku, Matthew N. O.
Publisher: Oxford University Press
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An aluminum film was deposited at a rate of 1 μm/min in vacuum at 25 °C. It was found that the oxygen content in the film was 0.01 at% (remember that is only O). What was the total air pressure in the system (assuming air is 20% O2)?
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