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1. For the integrated circuit interconnect shown below: The copper thickness is 5000 A and conductivity is 5 x 10° mho/m, the tungsten thickness is 500 A and conductivity is 2x 107 mho/m , w= 0.25 um Cu Erl = 6 (1 tH=200 A -S000 A

1. For the integrated circuit interconnect shown below: The copper thickness is 5000 A and conductivity is 5 x 10° mho/m, the tungsten thickness is 500 A and conductivity is 2x 107 mho/m , w= 0.25 um Cu Erl = 6 (1 tH=200 A -S000 A

Introductory Circuit Analysis (13th Edition)
Introductory Circuit Analysis (13th Edition)
13th Edition
ISBN:9780133923605
Author:Robert L. Boylestad
Publisher:Robert L. Boylestad
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1. For the integrated circuit interconnect shown below: The copper thickness is 5000 A and conductivity is 5 x 107 mho/m, the tungsten thickness is 500 A and conductivity is 2x 107 mho/m, W= 0.25 um Cu &rl = 6 tX=200 A E2 = 4 2 t2=5000 A
Transcribed Image Text:1. For the integrated circuit interconnect shown below: The copper thickness is 5000 A and conductivity is 5 x 107 mho/m, the tungsten thickness is 500 A and conductivity is 2x 107 mho/m, W= 0.25 um Cu &rl = 6 tX=200 A E2 = 4 2 t2=5000 A
For a 1cm length of interconnect: What is the resistance of the tungsten layer? a) b) What is the resistance of the copper layer? c) What is the total resistance of both layers? d) If a luA current is flowing through the interconnect, what is the current flowing through each of the two metal layers? e) Neglecting fringing capacitance, what is the capacitace between the top interconnect and the metal layer on the bottom? f) What is the magnitude of the charge on either top or bottom conductor if the potential diffrence is 1V? If the top conductor has a positive potential : g) What are the normal flux density vectors in both dielectric layers 1 and 2? h) What are the normal electric field vectors in 1 and 2? What are the normal polarization vectors in 1 and 2? i) j) What are the electric susceptibilities in 1 and 2? k) Draw the equivalent circuit for this interconnect system. 1) What kind of filtering function does this circuit do? m) What is the time constant of this equivalent circuit n) How does this interconnect impact the maximum performance of high speed digital logic gates?
Transcribed Image Text:For a 1cm length of interconnect: What is the resistance of the tungsten layer? a) b) What is the resistance of the copper layer? c) What is the total resistance of both layers? d) If a luA current is flowing through the interconnect, what is the current flowing through each of the two metal layers? e) Neglecting fringing capacitance, what is the capacitace between the top interconnect and the metal layer on the bottom? f) What is the magnitude of the charge on either top or bottom conductor if the potential diffrence is 1V? If the top conductor has a positive potential : g) What are the normal flux density vectors in both dielectric layers 1 and 2? h) What are the normal electric field vectors in 1 and 2? What are the normal polarization vectors in 1 and 2? i) j) What are the electric susceptibilities in 1 and 2? k) Draw the equivalent circuit for this interconnect system. 1) What kind of filtering function does this circuit do? m) What is the time constant of this equivalent circuit n) How does this interconnect impact the maximum performance of high speed digital logic gates?
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