Mask design. Silicon solar cell made of Al thin-film electrodes on silicon using lift-off technology. The linewidth of Al electrode is 10 μm and the spacing between the adjacent electrodes is 30 μm, diameter of the ring is 500 μm. There are two contact areas, 100 x 100 μm at the end of each electrode. Draw a mask, mark down the dimensions, and clearly indicate the tone (clear or opaque) of each region on the mask.

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Mask design. Silicon solar cell is made of Al thin-film electrodes on silicon using lift-off technology. The
linewidth of Al electrode is 10 μµm and the spacing between the adjacent electrodes is 30 µm, diameter of
the ring is 500 µm. There are two contact areas, 100 x 100 µm at the end of each electrode. Draw a mask,
mark down the dimensions, and clearly indicate the tone (clear or opaque) of each region on the mask.
Contact
Aluminum thin film
electrode
Silicon
Transcribed Image Text:Mask design. Silicon solar cell is made of Al thin-film electrodes on silicon using lift-off technology. The linewidth of Al electrode is 10 μµm and the spacing between the adjacent electrodes is 30 µm, diameter of the ring is 500 µm. There are two contact areas, 100 x 100 µm at the end of each electrode. Draw a mask, mark down the dimensions, and clearly indicate the tone (clear or opaque) of each region on the mask. Contact Aluminum thin film electrode Silicon
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