A) Continuing from a pre-deposition of dopants to a substrate with a bulk concentration of 1016/cm³, a drive-in step at 1100 °C yields a final junction depth of 1.1415 µm and a surface concentration of 3 x 1017/cm³. Given that the Arrhenius activation energy is 3.56 eV and the Do is 0.32 cm²/s, determine the drive-in time (in hour). B) Determine the total number of dopants per unit area introduced in this dual- diffusion process.

A) Continuing from a pre-deposition of dopants to a substrate with a bulk concentration of 1016/cm³, a drive-in step at 1100 °C yields a final junction depth of 1.1415 µm and a surface concentration of 3 x 1017/cm³. Given that the Arrhenius activation energy is 3.56 eV and the Do is 0.32 cm²/s, determine the drive-in time (in hour). B) Determine the total number of dopants per unit area introduced in this dual- diffusion process.

Principles of Instrumental Analysis

7th Edition

ISBN:9781305577213

Author:Douglas A. Skoog, F. James Holler, Stanley R. Crouch

Publisher:Douglas A. Skoog, F. James Holler, Stanley R. Crouch

Chapter15: Molecular Luminescence Spectrometry

Section: Chapter Questions

Problem 15.12QAP: Equations for the chemiluminescence determination of SO2 are given on page 383. Derive an expression...

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